MHS'96

SEVENTH INTERNATIONAL SYMPOSIUM

ON

MICRO MACHINE AND HUMAN SCIENCE

FINAL PROGRAM

Wednesday, October 2, 1996

10:00-10:30 Opening Ceremony at Hall

10:30-11:20 Keynote Lecture at Hall

Simulation Toolbox and Material Parameter Data Base for CMOS MEMS

Prof. Henry Baltes, Swiss Federal Institute of Technology, Switzerland

11:20-12:10 Plenary Lecture at Hall

Whither Microbots?

Prof. Ralph Hollis, Carnegie Mellon University, U.S.A.

13:10-14:00 Plenary Lecture at Hall

Microfluidics

Prof. Hermann Sandmaier, Institute of Micro and Information Technology, Germany

14:00-14:50 Plenary Lecture at Hall

MEMS for Telecommunication Systems

Dr. Hiroki Kuwano, NTT Integrated Information and Energy Systems Lab., Japan

15:20-16:10 Plenary Lecture at Hall

Control of Fluid Flows by Micro Transducers

Prof. Chih-Ming Ho, University of California, Los Angeles, U.S.A.

16:10-17:00 Plenary Lecture at Hall

Simulation and Visualization of the Fluid Flow Field in Aneurysms: AVirtual Environments Methodology

Prof. Walter J. Karplus, University of California, Los Angeles, U. S. A.

Thursday, October 3, 1996

9:20-10:00 Plenary Lecture at Hall

Characterization of MEMS Materials: Measurement of Etching Properties and Mechanical Strength

Prof. Kazuo Sato, Nagoya University, Japan

10:20-12:25 : Session A-1: Microfabrication

Chairpersons:

Koji Ikuta, Nagoya University, Japan

Ho, Chih-Ming , University of California, Los Angeles, U.S.A.

Consideration on the Producing of High Aspect Ratio Micro Parts Using UV Sensitive Photopolymer

T. Nakamoto and K.Yamaguchi, Nagoya University, Japan

P. Abraha A, Toyota Technological Institute, Japan

Rapid Prototyping: An Innovative Technique for Microfabrication of Metallic Parts

Y. P. Kathuria and A. Tsuboi, Laser X Co. Ltd., Japan

Microfabrication Using Silicon Mold Inserts and Hot Embossing

L. Lin and C.-J. Chiu, National Taiwan University, Taiwan

W. Bacher and M. Heckele, Forschungszentrum Karlsruhe, Germany

Tunable Micromirror Switches Using (110) Silicon Wafer

K.-S. Seo, Y.-H. Cho and S.-K. Youn, Korea Advanced Institute of Science & Technology, South Korea

A Compact SR beamline for Fabrication of High Aspect Ratio MEMS Microparts

S. Sugiyama, Ritsumeikan University, Japan

Y. Zhang, Sumitomo Heavy Industries, Ltd., Japan

H. Ueno, M. Hosaka and T. Fujimoto, Ritsumeikan University, Japan

R. Maeda, AIST/MITI, Japan

T.Tanaka , Ritsumeikan University, Japan

10:20-12:00 : Session A-2 : Microsensors and Microactuators

Chairpersons:

Hiroki Kuwano, NTT Integrated Information and Energy Systems Lab, Japan

Paolo Dario, Scuola Superiore San't Anna, Italy

A Planar Capacitive Micro Positioning Sensor

H. Furuichi, Hitachi, Ltd., Japan

R. S. Fearing, University of California, Berkeley, U.S.A

An Integrated Miniature Fingertip Sensor

P. Dario, R. Lazzarini and R. Magni, Scuola Superiore Sant'Anna, Italy

S. R. Oh, Korean Institute of Science and Technology, Korea

The Design of Two-layer Flexible Hinge Milli-gripper

H. Chen and P. Sun, Shanghai University, P. R. China

Micro Field in MEMS Actuators

T.H. Cui and Z.Y. Zhou, Tsinghua University, P. R. China

13:15-14:30 : Session B-1 : Mechanical Property

Chairpersons:

Osamu Tabata, Ritsumeikan University

Kazuo Sato, Nagoya University

Tensile Testing of Thin-Film Materials on a Silicon Chip

T. Yoshioka, M. Yamasaki, M. Shikida and K. Sato, Nagoya University, Japan

A Reforming Technique with Ion Implantation for Polysilicon Microstructures

Y. Takeuchi, M. Fujita, K. Kano, Y. Ohtsuka, S. Akita and T. Hattori, Nippondenso Co., Ltd., Japan

Measurement of Young's Modulus and Residual Stress of Micromembranes

X. Y. Ye, J. H. Zhang, Z. Y. Zhou and Y. Yang, Tsinghua University, P. R. China

13:15-14:30 : Session B-2 : Microactuators and Microdevices

Chairpersons:

Takeshi Nakamoto, Nagoya University

Hermann Sandmaier, Institute of Micro and Information Technology

Reversible Shape Memory Behaviors of TiNi Thin Films Processed by Direct Electric Current Heating

K. Kuribayashi and S. Shimizu, Yamaguchi University, Japan

M. Yoshitake and S. Ogawa, Technology Research Institute of Osaka Prefecture, Japan

Electrostatic Linear Micro Actuators with vibrating motion for Pan-tilt Drive of a Micro CCD Camera

A. Koga, K. Suzumori, T. Miyagawa and M. Sekimura, Toshiba Corp., Japan

An Electrostatic Quality Factor Control for Surface-micromachined Lateral Resonators

K. B. Lee and Y.-H. Cho, Korea Advanced Institute of Science and Technology, South Korea

14:55-17:00 : Session C-1 :Micromanipuylation and Visualization

- Toward Nanoworld 3D Micromanipulation - (Organized Session)

Chairpersons:

Prof. Fumihito Arai, Nagoya University

Integrated Micro Endeffector for Dexterous Micromanipulation

F. Arai and T. Fukuda, Nagoya University, Japan

H. Iwata and K. Itoigawa, Tokai Rika Co., LTD., Japan

Dynamic Focusing Lens for Expanding Depth of Focus of Optical Microscope

T. Kaneko, A. Yamamoto, T. Idogaki and T. Hattori, Nippondenso Co., Ltd., Japan

Acoustic Micromanipulation Using a Multi-Electrode Transducer

T. Kozuka, T. Tuziuti and H. Mitome, MITI, Japan

T. Fukuda, Nagoya University, Japan

Transportation of DNA Molecule by Dielectrophoretic Force Utilizing the Conformational Transition in the Higher Order Structure of DNA

K. Morishima, T. Fukuda, F. Arai, H. Matsuura and K. Yoshikawa, Nagoya University, Japan

Application of Local Temperature Control for DNA Micromanipulation

K. Hirano, R. Ishii, H. Imayou, M. Nishioka, Y. Matsuzawa, S. Katsura and A. Mizuno, Toyohashi University of Technology, Japan

14:55-17:00 : Session C-2 : Microactuators and Microrobots

Chairpersons:

Nobuyuki Iwatsuki, Tokyo Institute of Technology

Ralph Hollis, Carnegie Mellon University

Precision Positioning with a Rotary-linear Motor Driven by a Pair of 2-D Ultrasonic Actuators

N. Iwatsuki, I. Hayashi and R. Yamamoto, Tokyo Institute of Technology, Japan

J. Shibata, Shibaura Institute of Technology, Japan

A Threaded Wobble Motor with a 6-pole Stator - A Micro Motor Generating Large Linear Displacement -

T. Iizuka and H. Fujita, The University of Tokyo, Japan

A Mobile Microrobot Driven by a New Type of Electromagnetic Micromotor

C. Stefanini, M.C. Carrozza and P. Dario, Scuola Superiore Sant'Anna, Italy

A Remote Controlled Mobile Mini Robot

R. BÝÄhi, G. Caprari, V. Vuscovic and R. Siegwart, Swiss Federal Ins titute of Technology, Switzerland

A study of maze searching with multiple robots system

S. Yano, Kawasaki Heavy Industries, LTD., Japan

M. Noda, H. Itani, M. Natsume, H. Itoh and H. Hattori, Nagoya Municipal Industrial Research Institute, Japan

T. Odashima, K. Kaya , S. Kataoka and H.Yuasa, Nagoya University, Japan

X. Li, Daido Institute of Technology, Japan

M. Ando, W. Nogimori and T. Yamada, AISIN COSMOS R&D CO., LTD., Japan

Friday, October 4, 1996

9:20-10:00 Plenary Lecture at Hall

The MEM bug -Micro Electro Mechanical bug-

Prof. Isao Shimoyama, The University of Tokyo, Japan

10:20-12:25 : Session D-1: Medical Applications

Chairpersons:

Ken Ikeuchi, Kyoto University

Walter J. Karplus, University of California, Los Angeles

Intravascular Manipulation of Microcatheter System for Cerebral Vascular System

- Clinical Application for Monitoring and Treatment -

M. Negoro, Nagoya University, Japan

Locomotion of Medical Micro Robot with Spiral Ribs Using Mucus

K. Ikeuchi, Kyoto University, Japan

K. Yoshinaka and S. Hashimoto, Osaka Institute of Technology, Japan

N. Tomita, Kyoto University, Japan

A Microrobot for Colonoscopy

M. C. Carrozza, L. Lencioni, B. Magnani and P. Dario, Scuola Superiore

Sant'Anna, Italy D. Reynaerts, Katholieke Universiteit Leuven, Italy

M. G. Trivella, Istituto di Fisiologia Clinica, Italy

A. Pietrabissa,Universiteit di Pisa, Italy

Development and Experimental Verification of Micro Active Forceps for Microsurgery

K. Ikuta and T. Kato, Nagoya University, Japan

S. Nagata, Shiga University of Medical Science, Japan

Design and Experiments of Micro Pump Using ICPF Actuator

S. Guo and T. Nakamura, Mie University, Japan

T. Fukuda, Nagoya University, Japan

K. Oguro, Osaka National Research Institute, AIST, Japan

10:20-12:00 : Session D-2 : Computation and Control Systems

Chairpersons:

Koji Shimojima, National Industrial Research Institute of Nagoya

S. V. Ulyanov, The University of Electro-Communications

Quantum and Thermodynamic Self-Organization Conditions for Artificial Life of Biological Mobile Micro-Nano-Robot with AI Control (Report 2. Methodology of R & D and Stochastic Dynamic)

S. V. Ulyanov and K. Yamafuji, The University of Electro-Communications, Japan

T. Fukuda and F. Arai, Nagoya University, Japan

G. G. Rizzotto and A. Pagni, Corporate Advanced System Architectures SGS-THOMSON Microelectronics, Italy

Ecological algorithm for optimal ordering used by collective Honey bee behavior

Y. Yonezawa and T. Kikuchi, Ibaraki University, Japan

Immuno Fluctuate Model as Defence System included Complexity Process

S. Nagano, Y. Iwasaki and Y. Yonezawa, Ibaraki University, Japan

Flexible Manufacturing Communications Network in Distributed Robotics

Maria P., Poza F. and Nogueira J., University of Vigo, Spain

10:20-12:25 : Session A-1: Microfabrication

Chairpersons:

Koji Ikuta, Nagoya University, Japan

Ho, Chih-Ming , University of California, Los Angeles, U.S.A.

International Micro Robot Maze Contest

Chairperson: Kazuhiro Kozuge, Tohoku University

13:00-15:00 Preliminaries

Category 1: Teleoperated Mountain Climbing Micro Robots

Category 2: Wireless Autonomous Mobile Robots

15:30-16:30 Finals

Category 1: Teleoperated Mountain Climbing Micro Robots

Category 2: Wireless Autonomous Mobile Robots