MHS’98 Advanced Program

　

Wednesday, November 25, 1998

Nagoya Congress Center

　

Conference Room 1 (Room 234)

　

10:30-11:00 Opening Ceremony

　

Keynote Lecture

Conference Room 1 (Room 234)

　

11:00-11:50 Micro Sensors and Systems for Industrial Use

-Requirements and Specifications-

Prof. Dietrich Hofmann

CiS Institute for Microsensorics, Germany

　

Plenary Lectures

Conference Room 1 (Room 234)

　

13:10-14:00 Applications of MEMS Technology in Automotive Sensors and Actuators

Dr. Shih-Chia Chang

General Motors Research and Development Center, U.S.A.

　

14:00-14:50 Micromachine Technology Development and Its Applications

Dr. Shigeyuki Akita

Research Laboratories, DENSO CORPORATION, Japan　

　

15:20-16:10 Safety Relevant Microsystems for Automotive Applications

Dr. Helmut Seidel

Operating Division of Daimler-Benz for

Microsensors, Temic, Product Unit Sensor Systems, Germany

　

16:10-17:00 Microsensors and Microactuators Using Ferroelectric Thin Films

Prof. Masanori Okuyama

Osaka University, Japan

　

　

Thursday, November 26, 1998

Nagoya Congress Center

　

Invited Lecture

Conference Room 1 (Room 234)

　

9:10-10:00 Multi-user Integration Chip Service (MICS) Project for MEMS

Prof. Susumu Sugiyama

Ritsumeikan University, Japan　

　

Technical Sessions

　

Session A-1: Microfabrication

Conference Room1 (Room 234))

　

10:20-10:45 Ultra-fine Piercing by SiC Fiber Punch

T. Mori, K. Nakashima, D. Tokumoto

Nagoya University, Japan

　

10:45-11:10 Micromachining Applications of Selective Anodization

M. Murate and H. Iwata

TOKAI RIKA CO. LTD., Japan

　

11:10-11:35 Anisotropic Etching Properties of Silicon in KOH and TMAH Solutions

K. Tokoro, D. Uchikawa, M. Shikida and K. Sato

Nagoya University, Japan

　

11:35-12:00 A Study of Diffusion in Layered Thin Film

T. Yamamoto, H. Kotera, T. Hirasawa and S. Shima

Kyoto University, Japan

　

　

Session A-2: Microcomponents and Microdevices I

Conference Room2 (Room 233)

　

10:20-10:45 A Numerical Simulation on the Flowfield

of the Novel Pneumatic Actuator System Realized by Micro-EDM

T. Hirata and T. Akashi

Sumitomo Heavy Industries, Ltd., Japan,

M.-A. Grillat, O.T. Guenat and N. F. de Rooij

University of Nouchatel, Switzerland

　

10:45-11:10 An XYθ Actuator with a Closed-loop Magnetic Field

H. Kato, A. Torii and A. Ueda

Aichi Institute of Technology, Japan

　

11:10-11:35 Stick and Slip Actuators: Design, Control, Performances and Applications

J.-M. Breauet and R. Clavel

Ecole Polytechnique Fedale de Lausanne (EPFL), Switzerland

　

11:35-12:00 Control and Analysis of Low Intertia Miniature Synchronous Motors

J. D. Nicoud, O. Matthey and G. Caprari

Ecole Polytechnique Fedale de Lausanne (EPFL), Switzerland

　

　

Session B-1: 3D Microfabrication

Conference Room1 (Room 234)

　

13:05-13:30 Laser Microstructuring of Composite Powder Materials

Y P Kathuria

Laser X Co. Ltd., Japan

　

13:30-13:55 Laser Microprocessing of Stent for Medical Therapy

Y P Kathuria

Laser X Co. Ltd., Japan

　

13:55-14:20 New Microstereolithography (Super-IH Process) to Create 3D Freely

Movable Micromechanism without Sacrificial Layer Technique

S. Maruo and K. Ikuta

Nagoya University, Japan

　

14:20-14:45 Consideration on Alignment of Whisker in Unidirectional Whisker

Reinforced Micro Part Produced by UV Laser Photopolymerization

T. Nakamoto, K. Yamaguchi and T. Tsuchiya

Nagoya University, Japan

　

Session B-2: Micro/nano-manipulation and Control I

Conference Room2 (Room 233)

　

13:05-13:30 3D Micromanipulation System under Microscope

F. Arai, A. Kawaji, T. Sugiyama, Y. Onomura, M. Ogawa and T. Fukuda

Nagoya University, Japan

　

13:30-13:55 Control Issues in Micromanipulation

P. Kallio and Q. Zhou

Tampere University of Technology, Finland

H. Koivo

Helsinki University of Technology, Finland

　

13:55-14:20 2-D Micro Particle Assembly Using Atomic Force Microscope

M. Sitti, K. Hirahara and H. Hashimoto

University of Tokyo, Japan

　

　

Session C-1: Microcomponents and Microdevices II

Conference Room1 (Room 234)

　

15:05-15:30 Study on Fabrication of High Aspect Ratio Electrostatic Micro Actuators

Using LIGA Process

R. Kondo, K. Suzuki and S. Sugiyama

Ritsumeikan University, Japan

　

15:30-15:55 Study of Large Bending and Low Voltage Drive Electrostatic Actuator

with Novel Shaped Cantilever and Electrode

Y. Hirai, M. Shindo and Y. Tanaka

Osaka Prefecture University, Japan

　

15:55-16:20 A New Micro SMA Thin Film Actuator Prestrained by Polyimide

K. Kuribayashi and T. Fujii

Yamaguchi University, Japan

　

16:20-16:45 A Control System to Compensate the Hysteresis by Preisach Model

on SMA Actuator

T. Hasegawa

Nagoya University, Japan

S. Majima

Tsukuba University, Japan

　

16:45-17:10 Tunable Acoustic Absorber with Micro Deep Hole Array

M. Yoda, S. Sugiyama, S. Akishita and S. Konishi

Ritsumeikan University, Japan

17:10-17:35 Crystal Anisotropy of Elastoresistance Effect of Semiconductive Piezoresistor

and Its Application to Transducers

T. Toriyama and S. Sugiyama

Ritsumeikan University, Japan

　

　

Session C-2:Micro/nano-manipulation and Control II

Conference Room2 (Room 233)

　

15:05-15:30 Feasibility Study of Magnetically Levitated Micro Hand for Machining and Assembly

T. Nakamura, Y. Mori, Y. Kogure and H. Akamatsu

Tokyo Metropolitan University, Japan

　

15:30-15:55 Experimental Investigation of a Distributed Conveyance System Using Air Flow

S. Konishi, Y. Mizoguchi, M. Harada, K. Ohno

Ritsumeikan University, Japan

　

15:55-16:20 Two-Dimensional Acoustic Micromanipulation Using Three Ultrasonic Transducers

T. Kozuka, T. Tuziuti and H. Mitome

National Industrial Research Institute of Nagoya, Japan

T. Fukuda and F. Arai

Nagoya University, Japan

　

16:20-16:45 Manipulation of Single DNA Molecules on Globular State: Recovery into Capillary

and Direct Laser Trapping

K. Hirano, A. Yamaguchi, Y. Maeda, Y. Matsuzawa, S. Katsura and A. Mizuno

Toyohashi　University of Technology, Japan　

　

16:45-17:10 Reentrant Conformational Transitions in DNA Molecules Complexed with Cationic Surfactant

S. V. Mikhailenko (1, 2), V. G. Sergeyev (2), and K. Yoshikawa (3)

(1) Nagoya University, Japan, (2) Moscow State University, Russia, (3) Kyoto University, Japan

　

17:10-17:35 Physical Limits and Information Bounds of Micro Control

Part2: Quantum Computing and Quantum Searching Algorithms

S. V. Ulyanov (1,4), G. D. Antoni (3), K. Yamafuji (1), T. Fukuda (2),

      1. G. G. Rizzotto (3) and I. Kurawaki (4)

      2. 1. University of Electro-Communications, 2. Nagoya University, Japan,

3. SGS－THOMSON Microelectronics, 4. YAMAHA MOTOR CO., LTD., Japan

　

17:35-18:15 Explanation of Exhibit (Conference Room 1)

　

18:15-19:05 Reception Party

　

　

Friday, November 27, 1998

Nagoya Congress Center

　

Invited Lecture

Conference Room 1 (Room 234)

9:10-10:00 Micro Moving Robotics

Prof. Iwao Hayashi

Tokyo Institute of Technology, Japan

　

Technical Sessions

Session D-1: Microcomponents and Microdevices III

Conference Room1 (Room 234)

　

10:20-10:45 Transient Vibration Measurement of an Ultrasonic Motor Using Stroboscopic Phase-shift Interferometry

Y. Nishikura, A. Torii and A. Ueda

Aichi Institute of Technology, Japan

K. Hane

Tohoku University, Japan

　

10:45-11:10 The Autonomous Micro Robot "Alice": A Platform for Scientific and Commercial Applications

G. Caprari, P. Balmer, R. Piguet and R. Siegwart

Swiss Federal Institute of Technology in Lausanne (EPFL), Switzerland

　

11:10-11:35 Microwave Energy Supply for In-pipe Micromachine

T. Shibata, T. Sasaya and N. Kawahara

DENSO CORPORATION, Japan

　

11:35-12:00 Micro Robot in Small Pipe with Electromagnetic Actuator

L. Sun, P. Sun, X. Qin and C. Wang

Shanghai University, P. R. China

　

Session D-2: Microfluidic System

Conference Room 2 (Room 233)

　

10:20-10:45 Chemical IC Chip for Dynamical Control of Protein Synthesis

K. Ikuta S. Maruo, T. Fujisawa and Y. Fukaya

Nagoya University, Japan

　

10:45-11:10 A New Type of Capsule Micropump Using ICPF Actuator

S. Guo, S. Hata and K. Sugumoto

Kagawa University, Japan

T. Fukuda

Nagoya University, Japan

K. Oguro

Osaka National Institute (AIST), Japan

　

11:10-11:35 Theoretical Analysis and Experimental Testing of a Miniature Piezoelectric Pump.

D. Accoto, O. T. Nedelcu, M. C. Carrozza, P. Dario

Scuola Superiore Sant'Anna, Italy

　

11:35-12:00 A PZT-driven Micropump

Z. Zhou, X. Wang, X. Ye, Y. Li and W. Zhang

Tsinghua University, P. R. China

　

　

　

Saturday, November 28, 1998

　

International Micro Robot Maze Contest

　

Nagoya Congress Center

　

13:00-15:00 Preliminaries

Category 0: Teleoperated Micro Racer

Category 1: Teleoperated Mountain Climbing Micro Robots

　

15:30-16:30 Finals

Category 0: Teleoperated Micro Racer

Category 1: Teleoperated Mountain Climbing Micro Robots

Category 2: Wireless Autonomous Mobile Robots